JPS644838Y2 - - Google Patents
Info
- Publication number
- JPS644838Y2 JPS644838Y2 JP6204986U JP6204986U JPS644838Y2 JP S644838 Y2 JPS644838 Y2 JP S644838Y2 JP 6204986 U JP6204986 U JP 6204986U JP 6204986 U JP6204986 U JP 6204986U JP S644838 Y2 JPS644838 Y2 JP S644838Y2
- Authority
- JP
- Japan
- Prior art keywords
- power
- electrodes
- carbon
- power introduction
- positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 19
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 10
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 13
- 229910052799 carbon Inorganic materials 0.000 description 13
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6204986U JPS644838Y2 (en]) | 1986-04-23 | 1986-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6204986U JPS644838Y2 (en]) | 1986-04-23 | 1986-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62175071U JPS62175071U (en]) | 1987-11-06 |
| JPS644838Y2 true JPS644838Y2 (en]) | 1989-02-07 |
Family
ID=30895950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6204986U Expired JPS644838Y2 (en]) | 1986-04-23 | 1986-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS644838Y2 (en]) |
-
1986
- 1986-04-23 JP JP6204986U patent/JPS644838Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62175071U (en]) | 1987-11-06 |
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